Fabrication of planar SiC microelectrode arrays for longlifetime interfaces (ANR SiC neural).

Fabrication of planar SiC microelectrode arrays for longlifetime interfaces  (ANR SiC neural). F.Iacovella.

 

SiC is a semiconducting material already used by the industry in power electronics. 

Its excellent mechanical properties, chemical inertness and biocompatibility makes SiC suitable for the fabrication of neural interfaces. 

In this project, full SiC-based microelectrodes are fabricated relying on both conductive and insulating SiC layers. An enhancement of the SiC-based electrodes life time is expected in comparison with already existing neural electrodes based on polymers and metal layers. 

To increase the intensity of the recorded nervous signals, the microelectrode surface area is patterned with nanopillars. The next step will be the in-vitro characterization of the fabricated devices but also the development of thin flexible and thus implantable SiC-based devices.