Lignes
Platforms
For its technological developments, LTM is structured into three platforms. It co-pilots the Upstream Technology Platform (PTA) with IRIG. It has its own platforms enabling laboratory staff to develop technological research on 200 and 300mm process equipments (plasma etching, epitaxy), optical and physico-chemical characterization in clean rooms, and electron microscopy. The laboratory has also developed a platform dedicated to micro-fabrication for alternative applications.