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PROSPECT

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PROSPECT research cluster

The PROSPECT (PROcédés innovantS pour les dispositifs oPto et nanoEleCTroniques) team carries out upstream and prospective technological research in close collaboration with microelectronics industry. Its objective is to develop innovative and sustainable processes and materials to meet the needs of emerging opto- and nanoelectronic devices while reflecting on the energy and ecological impacts of its activity.

Heteroepitaxy and heterogeneous integration on Si platform

Advanced Plasma Processes