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The GECCO 200-300 platform is equipped with a variable-angle spectroscopic ellipsometer (Horiba-Jobin Yvon) coupled with a heating plate for measuring optical indices and material layer thickness. It also enables the characterization of structured periodic profiles using scatterometry metrology.

Additionally, the platform features a Krüss DSA100 drop angle measurement system for analyzing the wetting properties of solid surfaces in various environments. This system precisely measures:

• the static contact angle between a water droplet and a solid surface,
• advancing and receding angles,
• surface energy.

A Leica DM3XL optical microscope is also available, equipped with a 150 × 150 mm manual stage (compatible with 200 and 300 mm wafers), objectives ranging from x5 to x100, and a digital camera.

The platform includes a copolymer lithography area with solvent and acid/base fume hood benches.

Finally, the GECCO 200-300 platform is equipped with a HELIOS FIB-SEM (Thermo Fischer). It is located within the CEA-Leti's PFNC.