GECCO 200-300

LTM's GECCO 200-300 platform equipments are located in CEA-Leti's 200/300mm cleanrooms (Silicon Platform, PFS) and in its Nano-Characterization platform (PFNC). This platform is composed of 2 specific platforms: PEGNA, an etching and epitaxy process platform, and IMPACT, a characterisation platform linked to the process equipment. This 200-300 platform also has off-line characterisation equipment.

PhotoCredits : LTM

PhotoCredits : LTM