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Micro and nanofabrication platform

Motifs réalisés avec la litho 2 photons
Patterns made by A Fernandez on Microfab 3D, ormocomp resist

Located in building 40.06 (CEA Grenoble), the Technological Platform'Cameleon', is the result of the pooling of human, material and financial resources of the 2 poles of the LTM. It aims to meet the research technological needs of the LTM that cannot be supported on the LETI Nanotech 200/300 platforms and on the Upstream Technology Platform, by offering flexible and direct access to state-of-the-art micro and nano manufacturing tools.
The 'Cameleon' Platform is accessible to CEA, CNRS, 'Grenoble INP, Graduate Schools of Engineering and management, Université Grenoble Alpes-UGA' and UGA staff.

The objective of this structure is the development of technologies for manufacturing various micro and nanometric components, on substrates ranging from a few mm² to plates with a diameter of 200 mm. To achieve this goal, the 'Cameleon' Platform implements a clean room environment of about 150m², with a class ranging from 1000/ISO6 to 10000/ISO7, and laboratory and workshop rooms (100m²) with advanced equipment in micro and nanotechnology.


Download Presentation Poster of the Cameleon Platform in French 

Submitted on March 13, 2024

Updated on March 18, 2024